SpecEl Ellipsometer System

SpecEl Ellipsometer System

The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button.

All-in-one Accurate System

The SpecEl houses an integrated light source, a spectrometer and two polarizers fixed to 70°. It also includes a PC with a 32-bit Windows operating system. The SpecEl can detect a single layer as thin as 0.1 nm and up to 5 µm thick. In addition, it can provide refractive indices to 0.005°.

The SpecEl is available for Call for Price.

SpecEl Software and "Recipe" Files

In SpecEl Software, you can configure and save experiment method files for one-step analysis. after creating a "recipe," you can select the recipe to execute the experiment.

Specifications

Wavelength range:	380-780 nm (standard) or 450-900 nm (optional)
Optical resolution:	4.0 nm FWHM
Accuracy:	0.1 nm thickness; 0.005% refractive index
Angle of incidence:	70°
Film thickness:	1-5000 nm for single transparent film
Spot size:	2 mm x 4 mm (standard) or 200 µm x 400 µm (optional)
Sampling time:	3-15 seconds (minimum)
Kinetic logging:	3 seconds
Mechanical tolerance (height):	+/- 1.5 mm, angle +/- 1.0°
Number of layers:	Up to 32 layers
Reference:	Not applicable